| Clean room Dry Pump and Scrubber integration solutions |
| For all Foundry, IDM or DRAM manufacturer, yield rate of every Wafer, Cassette and Lot, which produced under certain Recipe, are required to be analysis and measured with the accuracy of up to few decimal points on percentage. As such, APC department will have to handle thousands of integration combination with the situation of having different devices (controllers) with different communication protocol standards, such as DCS, PLC, I/O Module and Ultra Sensor, etc.. |
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| It is impossible for all these devices to be in compliance with SEMI E54 standard. This means there will be dozens of equipment manufacturers with different communications protocols that have to be considered for integration. The Dry Pump devices are no exceptions as there are many different suppliers. |
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| Dry Pump data/information collection problems |
| Today, there are more than dozen of Dry Pump equipment manufacturers in the market. Some of them even having different format of communication protocols for different models. In order for the facility department to be able to conform to the requirements of processing capabilities or the demand of temporarily PM works. These Dry Pumps are required to be able to moved\ around constantly. This poses a big challenge for the manufacturer if they are to achieve the requirement of getting their data uploaded within minutes so as not to affect the machine production schedule" they are required to be able to shift the Pump location at any time, and having to achieve the requirement of getting data uploaded within minutes in order not to affect the machine production schedule. |
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| Prior to this, the CMS systems for equipment like Dry Pump are provided by the Equipment manufacturers. Every vendor has their own communication interface and protocol. The provided CMS systems were just like isolated islands of automationwhich totally can’t communicate with each other. This situation results： |
- The personnel of the equipment engineering department have to learn and maintain a variety of CMS systems operating procedures.
- Centralize management is not achievable due to process data dispersed in various vendors' systems.
- The downtime events of Pump are unpredictable, which can’t prevent damage of wafers effectively.
- Without centralized database system, defect and reason analysis can be performed effectively after event.
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| Resolving the problem of Dry Pump process data integration with creative methodology |
| For SECS / HSMS communication model, there must be a party who Send Request and then another party who Reply Message. For the case of Cluster Chamber machine (Tool), the amount of Dry Pump would be as many as four to six times of the machines. Suppose the Host requests the Dry Pump to report the processing data, the required number of Host may reach as many as couple of dozens in order to achieve the required efficiency. |
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| As shown in the diagram, we constructed the project with the product I/O Gateway, which running on Linux based platform and supports Multi Ports including RS-232 / 422 / 485. Each I/O Gateway, on average, read and collects 6 to 12 tags of process data into two InTouch HMI nodes which are setup as a redundant CMS (Central Monitoring System). |
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I/O Gateway characteristics：
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